School of Engineering :: The University of Jordan

Course Description :
Microtechnology and MEMS, micromachining, applications and markets, materials for MEMS, Silicon material systems, other materials and substrates, material properties and physical effects, processes for micromachining, bulk micromachining, surface micromachining, LIGA and UV depth lithography, commercial MEMS structures and systems, passive and active structures, packaging of MEMS, Nanotechnology, nanostructred materials, nanobiological systems, Carbon nanotubes, nanobots and other nano machines. Modeling for MEMS and NEMS, Dimensional analysis, scaling and scaling laws, thermally driven systems, modeling elastic structures, coupled thermal-elastic systems, electrostatic-elastic systems, magnetically actuated systems, microfluidics, lumped models, limits of continuum mechanics.
Pre Request : -
Credit Hour :3
Department : Mechanical Engineering
Program : PhD. of Mechanical Engineering
Course Level :Doctorate
Course Outline :

School of Engineering - Department of Mechanical Engineering